JPS6316445U - - Google Patents

Info

Publication number

JPS6316445U

JPS6316445U JP10987786U JP10987786U JPS6316445U JP S6316445 U JPS6316445 U JP S6316445U JP 10987786 U JP10987786 U JP 10987786U JP 10987786 U JP10987786 U JP 10987786U JP S6316445 U JPS6316445 U JP S6316445U

Authority

JP

Japan

Prior art keywords

die

measured

testing device

reflected light

placing

Prior art date

1986-07-16

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000001514 detection method Methods 0.000 claims description 2
• 230000003287 optical effect Effects 0.000 claims description 2
• 239000004065 semiconductor Substances 0.000 claims 1
• 238000005259 measurement Methods 0.000 description 2
• NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 2