JPS63164292A - ポリイミド／ケブラー基板に小径孔を選択的に形成する方法 - Google Patents
ポリイミド／ケブラー基板に小径孔を選択的に形成する方法Info
- Publication number
- JPS63164292A JPS63164292A JP26551887A JP26551887A JPS63164292A JP S63164292 A JPS63164292 A JP S63164292A JP 26551887 A JP26551887 A JP 26551887A JP 26551887 A JP26551887 A JP 26551887A JP S63164292 A JPS63164292 A JP S63164292A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- polyimide
- sulfuric acid
- keplar
- aperture
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 title claims description 59
- 239000004642 Polyimide Substances 0.000 title claims description 32
- 229920001721 polyimide Polymers 0.000 title claims description 32
- 238000000034 method Methods 0.000 title claims description 17
- 229920000271 Kevlar® Polymers 0.000 title 1
- 239000004761 kevlar Substances 0.000 title 1
- QAOWNCQODCNURD-UHFFFAOYSA-N sulfuric acid Substances OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 claims description 43
- 239000007788 liquid Substances 0.000 claims description 11
- 239000000463 material Substances 0.000 claims description 9
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 5
- 238000004140 cleaning Methods 0.000 claims 1
- 238000005406 washing Methods 0.000 claims 1
- 238000005253 cladding Methods 0.000 description 22
- 239000010410 layer Substances 0.000 description 12
- 229910052751 metal Inorganic materials 0.000 description 11
- 239000002184 metal Substances 0.000 description 11
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 10
- 229910052802 copper Inorganic materials 0.000 description 10
- 239000010949 copper Substances 0.000 description 10
- 229910000831 Steel Inorganic materials 0.000 description 5
- 239000010959 steel Substances 0.000 description 5
- 239000012790 adhesive layer Substances 0.000 description 4
- 239000011148 porous material Substances 0.000 description 4
- 239000000853 adhesive Substances 0.000 description 3
- 230000001070 adhesive effect Effects 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- 239000002002 slurry Substances 0.000 description 3
- 238000000354 decomposition reaction Methods 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 238000001000 micrograph Methods 0.000 description 2
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 2
- 239000004952 Polyamide Substances 0.000 description 1
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 229910000071 diazene Inorganic materials 0.000 description 1
- 238000005553 drilling Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000004070 electrodeposition Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 238000009499 grossing Methods 0.000 description 1
- FBAFATDZDUQKNH-UHFFFAOYSA-M iron chloride Chemical compound [Cl-].[Fe] FBAFATDZDUQKNH-UHFFFAOYSA-M 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 229920002647 polyamide Polymers 0.000 description 1
- 210000003625 skull Anatomy 0.000 description 1
- 238000002791 soaking Methods 0.000 description 1
- 229910052717 sulfur Inorganic materials 0.000 description 1
- 239000011593 sulfur Substances 0.000 description 1
Landscapes
- Manufacturing Of Printed Wiring (AREA)
- Manufacture Of Porous Articles, And Recovery And Treatment Of Waste Products (AREA)
- Chemically Coating (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US92325186A | 1986-10-27 | 1986-10-27 | |
| US923,251 | 1986-10-27 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63164292A true JPS63164292A (ja) | 1988-07-07 |
| JPH0429236B2 JPH0429236B2 (enrdf_load_stackoverflow) | 1992-05-18 |
Family
ID=25448384
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP26551887A Granted JPS63164292A (ja) | 1986-10-27 | 1987-10-22 | ポリイミド／ケブラー基板に小径孔を選択的に形成する方法 |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JPS63164292A (enrdf_load_stackoverflow) |
| DK (1) | DK529787A (enrdf_load_stackoverflow) |
| ES (1) | ES2005383A6 (enrdf_load_stackoverflow) |
| GR (1) | GR871344B (enrdf_load_stackoverflow) |
| IL (1) | IL83748A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114449765A (zh) * | 2022-01-18 | 2022-05-06 | 深圳恒宝士线路板有限公司 | 一种替代激光制作盲孔的hdi板制作方法 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7694505B2 (ja) | 2022-08-24 | 2025-06-18 | トヨタ自動車株式会社 | 電池用の電極、電池、および、電極の製造方法 |
-
1987
- 1987-09-01 GR GR871344A patent/GR871344B/el unknown
- 1987-09-02 IL IL83748A patent/IL83748A/xx not_active IP Right Cessation
- 1987-10-08 ES ES8702868A patent/ES2005383A6/es not_active Expired
- 1987-10-09 DK DK529787A patent/DK529787A/da not_active Application Discontinuation
- 1987-10-22 JP JP26551887A patent/JPS63164292A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114449765A (zh) * | 2022-01-18 | 2022-05-06 | 深圳恒宝士线路板有限公司 | 一种替代激光制作盲孔的hdi板制作方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| GR871344B (en) | 1988-02-17 |
| DK529787D0 (da) | 1987-10-09 |
| IL83748A0 (en) | 1988-02-29 |
| DK529787A (da) | 1988-04-28 |
| ES2005383A6 (es) | 1989-03-01 |
| JPH0429236B2 (enrdf_load_stackoverflow) | 1992-05-18 |
| IL83748A (en) | 1991-05-12 |
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