JPS63162434U - - Google Patents

Info

Publication number
JPS63162434U
JPS63162434U JP5510187U JP5510187U JPS63162434U JP S63162434 U JPS63162434 U JP S63162434U JP 5510187 U JP5510187 U JP 5510187U JP 5510187 U JP5510187 U JP 5510187U JP S63162434 U JPS63162434 U JP S63162434U
Authority
JP
Japan
Prior art keywords
piezoelectric
diaphragm
side contact
movable side
elastic body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5510187U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5510187U priority Critical patent/JPS63162434U/ja
Publication of JPS63162434U publication Critical patent/JPS63162434U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Micromachines (AREA)
JP5510187U 1987-04-10 1987-04-10 Pending JPS63162434U (US06633782-20031014-M00005.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5510187U JPS63162434U (US06633782-20031014-M00005.png) 1987-04-10 1987-04-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5510187U JPS63162434U (US06633782-20031014-M00005.png) 1987-04-10 1987-04-10

Publications (1)

Publication Number Publication Date
JPS63162434U true JPS63162434U (US06633782-20031014-M00005.png) 1988-10-24

Family

ID=30882700

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5510187U Pending JPS63162434U (US06633782-20031014-M00005.png) 1987-04-10 1987-04-10

Country Status (1)

Country Link
JP (1) JPS63162434U (US06633782-20031014-M00005.png)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6155838A (ja) * 1984-08-28 1986-03-20 株式会社　大興電機製作所 圧電形駆動機構

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6155838A (ja) * 1984-08-28 1986-03-20 株式会社　大興電機製作所 圧電形駆動機構

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