JPS63159837U - - Google Patents

Info

Publication number
JPS63159837U
JPS63159837U JP5375187U JP5375187U JPS63159837U JP S63159837 U JPS63159837 U JP S63159837U JP 5375187 U JP5375187 U JP 5375187U JP 5375187 U JP5375187 U JP 5375187U JP S63159837 U JPS63159837 U JP S63159837U
Authority
JP
Japan
Prior art keywords
metal insert
recess
wafer
wafer chuck
rotating shaft
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5375187U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5375187U priority Critical patent/JPS63159837U/ja
Publication of JPS63159837U publication Critical patent/JPS63159837U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Jigs For Machine Tools (AREA)
JP5375187U 1987-04-09 1987-04-09 Pending JPS63159837U (US07494231-20090224-C00006.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5375187U JPS63159837U (US07494231-20090224-C00006.png) 1987-04-09 1987-04-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5375187U JPS63159837U (US07494231-20090224-C00006.png) 1987-04-09 1987-04-09

Publications (1)

Publication Number Publication Date
JPS63159837U true JPS63159837U (US07494231-20090224-C00006.png) 1988-10-19

Family

ID=30880103

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5375187U Pending JPS63159837U (US07494231-20090224-C00006.png) 1987-04-09 1987-04-09

Country Status (1)

Country Link
JP (1) JPS63159837U (US07494231-20090224-C00006.png)

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