JPS63159828U - - Google Patents

Info

Publication number

JPS63159828U

JPS63159828U JP5290187U JP5290187U JPS63159828U JP S63159828 U JPS63159828 U JP S63159828U JP 5290187 U JP5290187 U JP 5290187U JP 5290187 U JP5290187 U JP 5290187U JP S63159828 U JPS63159828 U JP S63159828U

Authority

JP

Japan

Prior art keywords

wafer holder

wafer

vapor phase

phase growth

growth apparatus

Prior art date

1987-04-07

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000001947 vapour-phase growth Methods 0.000 claims description 2
• 239000004065 semiconductor Substances 0.000 claims 1
• HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims 1
• 229910010271 silicon carbide Inorganic materials 0.000 claims 1
• 210000000078 claw Anatomy 0.000 description 1
• 238000010586 diagram Methods 0.000 description 1