JPS63159761U - - Google Patents

Info

Publication number
JPS63159761U
JPS63159761U JP5374687U JP5374687U JPS63159761U JP S63159761 U JPS63159761 U JP S63159761U JP 5374687 U JP5374687 U JP 5374687U JP 5374687 U JP5374687 U JP 5374687U JP S63159761 U JPS63159761 U JP S63159761U
Authority
JP
Japan
Prior art keywords
chamber
sub
liquid
housing
thin film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5374687U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5374687U priority Critical patent/JPS63159761U/ja
Publication of JPS63159761U publication Critical patent/JPS63159761U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
JP5374687U 1987-04-09 1987-04-09 Pending JPS63159761U (US06815460-20041109-C00097.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5374687U JPS63159761U (US06815460-20041109-C00097.png) 1987-04-09 1987-04-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5374687U JPS63159761U (US06815460-20041109-C00097.png) 1987-04-09 1987-04-09

Publications (1)

Publication Number Publication Date
JPS63159761U true JPS63159761U (US06815460-20041109-C00097.png) 1988-10-19

Family

ID=30880094

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5374687U Pending JPS63159761U (US06815460-20041109-C00097.png) 1987-04-09 1987-04-09

Country Status (1)

Country Link
JP (1) JPS63159761U (US06815460-20041109-C00097.png)

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