JPS63157938U - - Google Patents

Info

Publication number
JPS63157938U
JPS63157938U JP4892887U JP4892887U JPS63157938U JP S63157938 U JPS63157938 U JP S63157938U JP 4892887 U JP4892887 U JP 4892887U JP 4892887 U JP4892887 U JP 4892887U JP S63157938 U JPS63157938 U JP S63157938U
Authority
JP
Japan
Prior art keywords
wafer
wafer storage
storage grooves
push rod
carrier
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4892887U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4892887U priority Critical patent/JPS63157938U/ja
Publication of JPS63157938U publication Critical patent/JPS63157938U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Warehouses Or Storage Devices (AREA)
  • Pile Receivers (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
JP4892887U 1987-04-02 1987-04-02 Pending JPS63157938U (US07534539-20090519-C00280.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4892887U JPS63157938U (US07534539-20090519-C00280.png) 1987-04-02 1987-04-02

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4892887U JPS63157938U (US07534539-20090519-C00280.png) 1987-04-02 1987-04-02

Publications (1)

Publication Number Publication Date
JPS63157938U true JPS63157938U (US07534539-20090519-C00280.png) 1988-10-17

Family

ID=30870916

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4892887U Pending JPS63157938U (US07534539-20090519-C00280.png) 1987-04-02 1987-04-02

Country Status (1)

Country Link
JP (1) JPS63157938U (US07534539-20090519-C00280.png)

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