JPS63155056U - - Google Patents

Info

Publication number

JPS63155056U

JPS63155056U JP4681187U JP4681187U JPS63155056U JP S63155056 U JPS63155056 U JP S63155056U JP 4681187 U JP4681187 U JP 4681187U JP 4681187 U JP4681187 U JP 4681187U JP S63155056 U JPS63155056 U JP S63155056U

Authority

JP

Japan

Prior art keywords

substrate material

substrate

lead portion

conductor

sensor element

Prior art date

1987-03-31

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000000758 substrate Substances 0.000 claims description 14
• 239000000463 material Substances 0.000 claims description 8
• 239000004020 conductor Substances 0.000 claims description 5
• 238000003475 lamination Methods 0.000 description 4
• 239000007789 gas Substances 0.000 description 3
• QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
• 238000010586 diagram Methods 0.000 description 1
• 239000001301 oxygen Substances 0.000 description 1
• 229910052760 oxygen Inorganic materials 0.000 description 1

Cited By (1)