JPS63155033U - - Google Patents

Info

Publication number
JPS63155033U
JPS63155033U JP4811287U JP4811287U JPS63155033U JP S63155033 U JPS63155033 U JP S63155033U JP 4811287 U JP4811287 U JP 4811287U JP 4811287 U JP4811287 U JP 4811287U JP S63155033 U JPS63155033 U JP S63155033U
Authority
JP
Japan
Prior art keywords
sheath
temperature measuring
measuring element
metal
metal sheath
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4811287U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0633392Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987048112U priority Critical patent/JPH0633392Y2/ja
Publication of JPS63155033U publication Critical patent/JPS63155033U/ja
Application granted granted Critical
Publication of JPH0633392Y2 publication Critical patent/JPH0633392Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Measuring Temperature Or Quantity Of Heat (AREA)
JP1987048112U 1987-03-30 1987-03-30 シ−ス型温度測定素子 Expired - Lifetime JPH0633392Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987048112U JPH0633392Y2 (ja) 1987-03-30 1987-03-30 シ−ス型温度測定素子

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987048112U JPH0633392Y2 (ja) 1987-03-30 1987-03-30 シ−ス型温度測定素子

Publications (2)

Publication Number Publication Date
JPS63155033U true JPS63155033U (US20080293856A1-20081127-C00150.png) 1988-10-12
JPH0633392Y2 JPH0633392Y2 (ja) 1994-08-31

Family

ID=30869345

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987048112U Expired - Lifetime JPH0633392Y2 (ja) 1987-03-30 1987-03-30 シ−ス型温度測定素子

Country Status (1)

Country Link
JP (1) JPH0633392Y2 (US20080293856A1-20081127-C00150.png)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR19990081157A (ko) * 1998-04-27 1999-11-15 김덕중 가스화기의 내부온도측정장치
KR20020052869A (ko) * 2000-12-26 2002-07-04 이구택 션트에러 방지를 위한 고온측정용 열전대
JP2010008314A (ja) * 2008-06-30 2010-01-14 Yamatake Corp 温度センサ
JP2010054491A (ja) * 2008-07-30 2010-03-11 Saginomiya Seisakusho Inc 温度測定センサーおよび温度測定センサーを用いた温度測定装置
JP2014130133A (ja) * 2012-12-28 2014-07-10 Woojin Electronite Inc ホルダー取り替え部材及びこれを含むホルダー組立体

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7453079B2 (ja) * 2020-07-16 2024-03-19 東京エレクトロン株式会社 温度センサ及びプラズマ処理装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57118933U (US20080293856A1-20081127-C00150.png) * 1981-01-19 1982-07-23

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57118933U (US20080293856A1-20081127-C00150.png) * 1981-01-19 1982-07-23

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR19990081157A (ko) * 1998-04-27 1999-11-15 김덕중 가스화기의 내부온도측정장치
KR20020052869A (ko) * 2000-12-26 2002-07-04 이구택 션트에러 방지를 위한 고온측정용 열전대
JP2010008314A (ja) * 2008-06-30 2010-01-14 Yamatake Corp 温度センサ
JP2010054491A (ja) * 2008-07-30 2010-03-11 Saginomiya Seisakusho Inc 温度測定センサーおよび温度測定センサーを用いた温度測定装置
KR101107926B1 (ko) 2008-07-30 2012-01-25 가부시키가이샤 사기노미야세이사쿠쇼 온도 측정 센서 및 온도 측정 센서를 이용한 온도 측정 장치
JP2014130133A (ja) * 2012-12-28 2014-07-10 Woojin Electronite Inc ホルダー取り替え部材及びこれを含むホルダー組立体

Also Published As

Publication number Publication date
JPH0633392Y2 (ja) 1994-08-31

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