JPS63155033U - - Google Patents
Info
- Publication number
- JPS63155033U JPS63155033U JP4811287U JP4811287U JPS63155033U JP S63155033 U JPS63155033 U JP S63155033U JP 4811287 U JP4811287 U JP 4811287U JP 4811287 U JP4811287 U JP 4811287U JP S63155033 U JPS63155033 U JP S63155033U
- Authority
- JP
- Japan
- Prior art keywords
- sheath
- temperature measuring
- measuring element
- metal
- metal sheath
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000002184 metal Substances 0.000 claims description 7
- 239000012212 insulator Substances 0.000 claims description 4
- 238000009529 body temperature measurement Methods 0.000 description 2
- 238000009413 insulation Methods 0.000 description 1
Landscapes
- Measuring Temperature Or Quantity Of Heat (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1987048112U JPH0633392Y2 (ja) | 1987-03-30 | 1987-03-30 | シ−ス型温度測定素子 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1987048112U JPH0633392Y2 (ja) | 1987-03-30 | 1987-03-30 | シ−ス型温度測定素子 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS63155033U true JPS63155033U (US07122603-20061017-C00045.png) | 1988-10-12 |
JPH0633392Y2 JPH0633392Y2 (ja) | 1994-08-31 |
Family
ID=30869345
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1987048112U Expired - Lifetime JPH0633392Y2 (ja) | 1987-03-30 | 1987-03-30 | シ−ス型温度測定素子 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0633392Y2 (US07122603-20061017-C00045.png) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR19990081157A (ko) * | 1998-04-27 | 1999-11-15 | 김덕중 | 가스화기의 내부온도측정장치 |
KR20020052869A (ko) * | 2000-12-26 | 2002-07-04 | 이구택 | 션트에러 방지를 위한 고온측정용 열전대 |
JP2010008314A (ja) * | 2008-06-30 | 2010-01-14 | Yamatake Corp | 温度センサ |
JP2010054491A (ja) * | 2008-07-30 | 2010-03-11 | Saginomiya Seisakusho Inc | 温度測定センサーおよび温度測定センサーを用いた温度測定装置 |
JP2014130133A (ja) * | 2012-12-28 | 2014-07-10 | Woojin Electronite Inc | ホルダー取り替え部材及びこれを含むホルダー組立体 |
JP2022018802A (ja) * | 2020-07-16 | 2022-01-27 | 東京エレクトロン株式会社 | 温度センサ及びプラズマ処理装置 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57118933U (US07122603-20061017-C00045.png) * | 1981-01-19 | 1982-07-23 |
-
1987
- 1987-03-30 JP JP1987048112U patent/JPH0633392Y2/ja not_active Expired - Lifetime
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57118933U (US07122603-20061017-C00045.png) * | 1981-01-19 | 1982-07-23 |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR19990081157A (ko) * | 1998-04-27 | 1999-11-15 | 김덕중 | 가스화기의 내부온도측정장치 |
KR20020052869A (ko) * | 2000-12-26 | 2002-07-04 | 이구택 | 션트에러 방지를 위한 고온측정용 열전대 |
JP2010008314A (ja) * | 2008-06-30 | 2010-01-14 | Yamatake Corp | 温度センサ |
JP2010054491A (ja) * | 2008-07-30 | 2010-03-11 | Saginomiya Seisakusho Inc | 温度測定センサーおよび温度測定センサーを用いた温度測定装置 |
KR101107926B1 (ko) | 2008-07-30 | 2012-01-25 | 가부시키가이샤 사기노미야세이사쿠쇼 | 온도 측정 센서 및 온도 측정 센서를 이용한 온도 측정 장치 |
JP2014130133A (ja) * | 2012-12-28 | 2014-07-10 | Woojin Electronite Inc | ホルダー取り替え部材及びこれを含むホルダー組立体 |
JP2022018802A (ja) * | 2020-07-16 | 2022-01-27 | 東京エレクトロン株式会社 | 温度センサ及びプラズマ処理装置 |
Also Published As
Publication number | Publication date |
---|---|
JPH0633392Y2 (ja) | 1994-08-31 |