JPS63153518U - - Google Patents

Info

Publication number
JPS63153518U
JPS63153518U JP4640187U JP4640187U JPS63153518U JP S63153518 U JPS63153518 U JP S63153518U JP 4640187 U JP4640187 U JP 4640187U JP 4640187 U JP4640187 U JP 4640187U JP S63153518 U JPS63153518 U JP S63153518U
Authority
JP
Japan
Prior art keywords
shaft
drive shaft
driven shaft
drive
support arm
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4640187U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4640187U priority Critical patent/JPS63153518U/ja
Publication of JPS63153518U publication Critical patent/JPS63153518U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP4640187U 1987-03-27 1987-03-27 Pending JPS63153518U (US20030204162A1-20031030-M00001.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4640187U JPS63153518U (US20030204162A1-20031030-M00001.png) 1987-03-27 1987-03-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4640187U JPS63153518U (US20030204162A1-20031030-M00001.png) 1987-03-27 1987-03-27

Publications (1)

Publication Number Publication Date
JPS63153518U true JPS63153518U (US20030204162A1-20031030-M00001.png) 1988-10-07

Family

ID=30866030

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4640187U Pending JPS63153518U (US20030204162A1-20031030-M00001.png) 1987-03-27 1987-03-27

Country Status (1)

Country Link
JP (1) JPS63153518U (US20030204162A1-20031030-M00001.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2540860A3 (en) * 2011-06-27 2015-03-04 United Technologies Corporation Planetary manipulator for PVD coating system

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2540860A3 (en) * 2011-06-27 2015-03-04 United Technologies Corporation Planetary manipulator for PVD coating system
US9109289B2 (en) 2011-06-27 2015-08-18 United Technologies Corporation Manipulator for coating application

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