JPS63152654U - - Google Patents

Info

Publication number
JPS63152654U
JPS63152654U JP4360587U JP4360587U JPS63152654U JP S63152654 U JPS63152654 U JP S63152654U JP 4360587 U JP4360587 U JP 4360587U JP 4360587 U JP4360587 U JP 4360587U JP S63152654 U JPS63152654 U JP S63152654U
Authority
JP
Japan
Prior art keywords
liquid container
rotor
drive shaft
spin dryer
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4360587U
Other languages
English (en)
Japanese (ja)
Other versions
JPH069498Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987043605U priority Critical patent/JPH069498Y2/ja
Publication of JPS63152654U publication Critical patent/JPS63152654U/ja
Application granted granted Critical
Publication of JPH069498Y2 publication Critical patent/JPH069498Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Drying Of Solid Materials (AREA)
  • Centrifugal Separators (AREA)
JP1987043605U 1987-03-24 1987-03-24 スピンドライヤ Expired - Lifetime JPH069498Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987043605U JPH069498Y2 (ja) 1987-03-24 1987-03-24 スピンドライヤ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987043605U JPH069498Y2 (ja) 1987-03-24 1987-03-24 スピンドライヤ

Publications (2)

Publication Number Publication Date
JPS63152654U true JPS63152654U (enrdf_load_stackoverflow) 1988-10-06
JPH069498Y2 JPH069498Y2 (ja) 1994-03-09

Family

ID=30860620

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987043605U Expired - Lifetime JPH069498Y2 (ja) 1987-03-24 1987-03-24 スピンドライヤ

Country Status (1)

Country Link
JP (1) JPH069498Y2 (enrdf_load_stackoverflow)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5586963A (en) * 1978-12-22 1980-07-01 Hitachi Ltd Sealing device
JPS6142919A (ja) * 1984-08-01 1986-03-01 エフエスアイ　コーポレイシヨン 基板処理機のためのラビリンスシール

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5586963A (en) * 1978-12-22 1980-07-01 Hitachi Ltd Sealing device
JPS6142919A (ja) * 1984-08-01 1986-03-01 エフエスアイ　コーポレイシヨン 基板処理機のためのラビリンスシール

Also Published As

Publication number Publication date
JPH069498Y2 (ja) 1994-03-09

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