JPS63151982U - - Google Patents

Info

Publication number
JPS63151982U
JPS63151982U JP4430287U JP4430287U JPS63151982U JP S63151982 U JPS63151982 U JP S63151982U JP 4430287 U JP4430287 U JP 4430287U JP 4430287 U JP4430287 U JP 4430287U JP S63151982 U JPS63151982 U JP S63151982U
Authority
JP
Japan
Prior art keywords
vacuum
filter
air supply
state
atmospheric pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4430287U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4430287U priority Critical patent/JPS63151982U/ja
Publication of JPS63151982U publication Critical patent/JPS63151982U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Welding Or Cutting Using Electron Beams (AREA)
JP4430287U 1987-03-27 1987-03-27 Pending JPS63151982U (US07922777-20110412-C00004.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4430287U JPS63151982U (US07922777-20110412-C00004.png) 1987-03-27 1987-03-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4430287U JPS63151982U (US07922777-20110412-C00004.png) 1987-03-27 1987-03-27

Publications (1)

Publication Number Publication Date
JPS63151982U true JPS63151982U (US07922777-20110412-C00004.png) 1988-10-05

Family

ID=30861983

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4430287U Pending JPS63151982U (US07922777-20110412-C00004.png) 1987-03-27 1987-03-27

Country Status (1)

Country Link
JP (1) JPS63151982U (US07922777-20110412-C00004.png)

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