JPS6315040U - - Google Patents
Info
- Publication number
- JPS6315040U JPS6315040U JP10883486U JP10883486U JPS6315040U JP S6315040 U JPS6315040 U JP S6315040U JP 10883486 U JP10883486 U JP 10883486U JP 10883486 U JP10883486 U JP 10883486U JP S6315040 U JPS6315040 U JP S6315040U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- reaction tube
- insertion port
- boat
- temperature section
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000006243 chemical reaction Methods 0.000 claims description 5
- 238000010438 heat treatment Methods 0.000 claims description 5
- 238000003780 insertion Methods 0.000 claims description 4
- 230000037431 insertion Effects 0.000 claims description 4
- 238000000137 annealing Methods 0.000 claims 1
- 230000003647 oxidation Effects 0.000 claims 1
- 238000007254 oxidation reaction Methods 0.000 claims 1
- 238000000034 method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10883486U JPS6315040U (cs) | 1986-07-16 | 1986-07-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10883486U JPS6315040U (cs) | 1986-07-16 | 1986-07-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6315040U true JPS6315040U (cs) | 1988-02-01 |
Family
ID=30986391
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10883486U Pending JPS6315040U (cs) | 1986-07-16 | 1986-07-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6315040U (cs) |
-
1986
- 1986-07-16 JP JP10883486U patent/JPS6315040U/ja active Pending
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