JPS63149966U - - Google Patents

Info

Publication number
JPS63149966U
JPS63149966U JP4089687U JP4089687U JPS63149966U JP S63149966 U JPS63149966 U JP S63149966U JP 4089687 U JP4089687 U JP 4089687U JP 4089687 U JP4089687 U JP 4089687U JP S63149966 U JPS63149966 U JP S63149966U
Authority
JP
Japan
Prior art keywords
substrate
surface treatment
rectifier plate
model registration
utility
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4089687U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0354139Y2 (https=
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4089687U priority Critical patent/JPH0354139Y2/ja
Publication of JPS63149966U publication Critical patent/JPS63149966U/ja
Application granted granted Critical
Publication of JPH0354139Y2 publication Critical patent/JPH0354139Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)
JP4089687U 1987-03-23 1987-03-23 Expired JPH0354139Y2 (https=)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4089687U JPH0354139Y2 (https=) 1987-03-23 1987-03-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4089687U JPH0354139Y2 (https=) 1987-03-23 1987-03-23

Publications (2)

Publication Number Publication Date
JPS63149966U true JPS63149966U (https=) 1988-10-03
JPH0354139Y2 JPH0354139Y2 (https=) 1991-11-28

Family

ID=30855396

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4089687U Expired JPH0354139Y2 (https=) 1987-03-23 1987-03-23

Country Status (1)

Country Link
JP (1) JPH0354139Y2 (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017133078A (ja) * 2016-01-29 2017-08-03 株式会社ケミトロン エッチング装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017133078A (ja) * 2016-01-29 2017-08-03 株式会社ケミトロン エッチング装置

Also Published As

Publication number Publication date
JPH0354139Y2 (https=) 1991-11-28

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