JPS63149526U - - Google Patents

Info

Publication number

JPS63149526U

JPS63149526U JP4201787U JP4201787U JPS63149526U JP S63149526 U JPS63149526 U JP S63149526U JP 4201787 U JP4201787 U JP 4201787U JP 4201787 U JP4201787 U JP 4201787U JP S63149526 U JPS63149526 U JP S63149526U

Authority

JP

Japan

Prior art keywords

pure water

float

chemical liquid

semiconductor wafer

tank

Prior art date

1987-03-24

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000000126 substance Substances 0.000 claims description 5
• 238000005303 weighing Methods 0.000 claims description 5
• XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 4
• 239000007788 liquid Substances 0.000 claims description 3
• 238000000034 method Methods 0.000 claims description 3
• 239000004065 semiconductor Substances 0.000 claims description 2
• 238000010586 diagram Methods 0.000 description 2