JPS63145356U - - Google Patents

Info

Publication number
JPS63145356U
JPS63145356U JP1987035872U JP3587287U JPS63145356U JP S63145356 U JPS63145356 U JP S63145356U JP 1987035872 U JP1987035872 U JP 1987035872U JP 3587287 U JP3587287 U JP 3587287U JP S63145356 U JPS63145356 U JP S63145356U
Authority
JP
Japan
Prior art keywords
piezoelectric
diaphragm
attached
piezoelectric actuator
conductive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1987035872U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987035872U priority Critical patent/JPS63145356U/ja
Publication of JPS63145356U publication Critical patent/JPS63145356U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
JP1987035872U 1987-03-13 1987-03-13 Pending JPS63145356U (US20030157376A1-20030821-M00001.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987035872U JPS63145356U (US20030157376A1-20030821-M00001.png) 1987-03-13 1987-03-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987035872U JPS63145356U (US20030157376A1-20030821-M00001.png) 1987-03-13 1987-03-13

Publications (1)

Publication Number Publication Date
JPS63145356U true JPS63145356U (US20030157376A1-20030821-M00001.png) 1988-09-26

Family

ID=30845756

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987035872U Pending JPS63145356U (US20030157376A1-20030821-M00001.png) 1987-03-13 1987-03-13

Country Status (1)

Country Link
JP (1) JPS63145356U (US20030157376A1-20030821-M00001.png)

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