JPS63145326U - - Google Patents

Info

Publication number
JPS63145326U
JPS63145326U JP3590187U JP3590187U JPS63145326U JP S63145326 U JPS63145326 U JP S63145326U JP 3590187 U JP3590187 U JP 3590187U JP 3590187 U JP3590187 U JP 3590187U JP S63145326 U JPS63145326 U JP S63145326U
Authority
JP
Japan
Prior art keywords
semiconductor manufacturing
manufacturing equipment
chamber
exhaust system
processing chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3590187U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3590187U priority Critical patent/JPS63145326U/ja
Publication of JPS63145326U publication Critical patent/JPS63145326U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP3590187U 1987-03-13 1987-03-13 Pending JPS63145326U (US20100012521A1-20100121-C00001.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3590187U JPS63145326U (US20100012521A1-20100121-C00001.png) 1987-03-13 1987-03-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3590187U JPS63145326U (US20100012521A1-20100121-C00001.png) 1987-03-13 1987-03-13

Publications (1)

Publication Number Publication Date
JPS63145326U true JPS63145326U (US20100012521A1-20100121-C00001.png) 1988-09-26

Family

ID=30845814

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3590187U Pending JPS63145326U (US20100012521A1-20100121-C00001.png) 1987-03-13 1987-03-13

Country Status (1)

Country Link
JP (1) JPS63145326U (US20100012521A1-20100121-C00001.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004087584A (ja) * 2002-08-23 2004-03-18 Nec Kyushu Ltd ドライエッチング装置およびそのドライエッチング方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004087584A (ja) * 2002-08-23 2004-03-18 Nec Kyushu Ltd ドライエッチング装置およびそのドライエッチング方法

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