JPS63144951U - - Google Patents

Info

Publication number
JPS63144951U
JPS63144951U JP3815887U JP3815887U JPS63144951U JP S63144951 U JPS63144951 U JP S63144951U JP 3815887 U JP3815887 U JP 3815887U JP 3815887 U JP3815887 U JP 3815887U JP S63144951 U JPS63144951 U JP S63144951U
Authority
JP
Japan
Prior art keywords
drive shaft
wafer transfer
section
groove
transfer device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3815887U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3815887U priority Critical patent/JPS63144951U/ja
Publication of JPS63144951U publication Critical patent/JPS63144951U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Framework For Endless Conveyors (AREA)
  • Delivering By Means Of Belts And Rollers (AREA)
JP3815887U 1987-03-16 1987-03-16 Pending JPS63144951U (US07922777-20110412-C00004.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3815887U JPS63144951U (US07922777-20110412-C00004.png) 1987-03-16 1987-03-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3815887U JPS63144951U (US07922777-20110412-C00004.png) 1987-03-16 1987-03-16

Publications (1)

Publication Number Publication Date
JPS63144951U true JPS63144951U (US07922777-20110412-C00004.png) 1988-09-26

Family

ID=30850141

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3815887U Pending JPS63144951U (US07922777-20110412-C00004.png) 1987-03-16 1987-03-16

Country Status (1)

Country Link
JP (1) JPS63144951U (US07922777-20110412-C00004.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006111280A (ja) * 2004-10-13 2006-04-27 General Packer Co Ltd 包装袋の供給用コンベア

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5583241A (en) * 1978-12-20 1980-06-23 Toshiba Corp Semiconductor wafer transferring machine

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5583241A (en) * 1978-12-20 1980-06-23 Toshiba Corp Semiconductor wafer transferring machine

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006111280A (ja) * 2004-10-13 2006-04-27 General Packer Co Ltd 包装袋の供給用コンベア

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