JPS63142830U - - Google Patents

Info

Publication number
JPS63142830U
JPS63142830U JP3440387U JP3440387U JPS63142830U JP S63142830 U JPS63142830 U JP S63142830U JP 3440387 U JP3440387 U JP 3440387U JP 3440387 U JP3440387 U JP 3440387U JP S63142830 U JPS63142830 U JP S63142830U
Authority
JP
Japan
Prior art keywords
lower electrode
dry etching
parallel plate
electrode
ring electrodes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3440387U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3440387U priority Critical patent/JPS63142830U/ja
Publication of JPS63142830U publication Critical patent/JPS63142830U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP3440387U 1987-03-11 1987-03-11 Pending JPS63142830U (US07223432-20070529-C00017.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3440387U JPS63142830U (US07223432-20070529-C00017.png) 1987-03-11 1987-03-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3440387U JPS63142830U (US07223432-20070529-C00017.png) 1987-03-11 1987-03-11

Publications (1)

Publication Number Publication Date
JPS63142830U true JPS63142830U (US07223432-20070529-C00017.png) 1988-09-20

Family

ID=30842919

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3440387U Pending JPS63142830U (US07223432-20070529-C00017.png) 1987-03-11 1987-03-11

Country Status (1)

Country Link
JP (1) JPS63142830U (US07223432-20070529-C00017.png)

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