JPS63139497U - - Google Patents

Info

Publication number
JPS63139497U
JPS63139497U JP3189787U JP3189787U JPS63139497U JP S63139497 U JPS63139497 U JP S63139497U JP 3189787 U JP3189787 U JP 3189787U JP 3189787 U JP3189787 U JP 3189787U JP S63139497 U JPS63139497 U JP S63139497U
Authority
JP
Japan
Prior art keywords
crucible
main body
utility
model registration
lid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3189787U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0343229Y2 (US20080094685A1-20080424-C00004.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3189787U priority Critical patent/JPH0343229Y2/ja
Publication of JPS63139497U publication Critical patent/JPS63139497U/ja
Application granted granted Critical
Publication of JPH0343229Y2 publication Critical patent/JPH0343229Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP3189787U 1987-03-06 1987-03-06 Expired JPH0343229Y2 (US20080094685A1-20080424-C00004.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3189787U JPH0343229Y2 (US20080094685A1-20080424-C00004.png) 1987-03-06 1987-03-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3189787U JPH0343229Y2 (US20080094685A1-20080424-C00004.png) 1987-03-06 1987-03-06

Publications (2)

Publication Number Publication Date
JPS63139497U true JPS63139497U (US20080094685A1-20080424-C00004.png) 1988-09-13
JPH0343229Y2 JPH0343229Y2 (US20080094685A1-20080424-C00004.png) 1991-09-10

Family

ID=30838055

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3189787U Expired JPH0343229Y2 (US20080094685A1-20080424-C00004.png) 1987-03-06 1987-03-06

Country Status (1)

Country Link
JP (1) JPH0343229Y2 (US20080094685A1-20080424-C00004.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100375341B1 (ko) * 2000-08-18 2003-03-10 대백신소재주식회사 흑연화 처리용 도가니
JP2023013910A (ja) * 2021-07-15 2023-01-26 キヤノントッキ株式会社 成膜装置、成膜方法及び蒸発源ユニット

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100375341B1 (ko) * 2000-08-18 2003-03-10 대백신소재주식회사 흑연화 처리용 도가니
JP2023013910A (ja) * 2021-07-15 2023-01-26 キヤノントッキ株式会社 成膜装置、成膜方法及び蒸発源ユニット

Also Published As

Publication number Publication date
JPH0343229Y2 (US20080094685A1-20080424-C00004.png) 1991-09-10

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