JPS63139290A - 微動機構 - Google Patents

微動機構

Info

Publication number
JPS63139290A
JPS63139290A JP61287268A JP28726886A JPS63139290A JP S63139290 A JPS63139290 A JP S63139290A JP 61287268 A JP61287268 A JP 61287268A JP 28726886 A JP28726886 A JP 28726886A JP S63139290 A JPS63139290 A JP S63139290A
Authority
JP
Japan
Prior art keywords
fine movement
movement mechanism
fixed
fulcrum
lever
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP61287268A
Other languages
English (en)
Japanese (ja)
Other versions
JPH044560B2 (enrdf_load_stackoverflow
Inventor
上沢　豊
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olympus Corp
Original Assignee
Olympus Optical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Optical Co Ltd filed Critical Olympus Optical Co Ltd
Priority to JP61287268A priority Critical patent/JPS63139290A/ja
Publication of JPS63139290A publication Critical patent/JPS63139290A/ja
Publication of JPH044560B2 publication Critical patent/JPH044560B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Details Of Measuring And Other Instruments (AREA)
JP61287268A 1986-12-02 1986-12-02 微動機構 Granted JPS63139290A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61287268A JPS63139290A (ja) 1986-12-02 1986-12-02 微動機構

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61287268A JPS63139290A (ja) 1986-12-02 1986-12-02 微動機構

Publications (2)

Publication Number Publication Date
JPS63139290A true JPS63139290A (ja) 1988-06-11
JPH044560B2 JPH044560B2 (enrdf_load_stackoverflow) 1992-01-28

Family

ID=17715204

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61287268A Granted JPS63139290A (ja) 1986-12-02 1986-12-02 微動機構

Country Status (1)

Country Link
JP (1) JPS63139290A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02183429A (ja) * 1989-01-06 1990-07-18 Hitachi Ltd 情報記録再生用光ピックアップ
WO2022137427A1 (ja) * 2020-12-24 2022-06-30 株式会社日立ハイテク 荷電粒子顕微鏡およびステージ

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5717493U (enrdf_load_stackoverflow) * 1980-06-27 1982-01-29

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5717493U (enrdf_load_stackoverflow) * 1980-06-27 1982-01-29

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02183429A (ja) * 1989-01-06 1990-07-18 Hitachi Ltd 情報記録再生用光ピックアップ
WO2022137427A1 (ja) * 2020-12-24 2022-06-30 株式会社日立ハイテク 荷電粒子顕微鏡およびステージ
JPWO2022137427A1 (enrdf_load_stackoverflow) * 2020-12-24 2022-06-30

Also Published As

Publication number Publication date
JPH044560B2 (enrdf_load_stackoverflow) 1992-01-28

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term