JPS631382Y2 - - Google Patents
Info
- Publication number
- JPS631382Y2 JPS631382Y2 JP19537483U JP19537483U JPS631382Y2 JP S631382 Y2 JPS631382 Y2 JP S631382Y2 JP 19537483 U JP19537483 U JP 19537483U JP 19537483 U JP19537483 U JP 19537483U JP S631382 Y2 JPS631382 Y2 JP S631382Y2
- Authority
- JP
- Japan
- Prior art keywords
- temperature
- light irradiation
- lamp
- discharge lamp
- metal rod
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 229910052751 metal Inorganic materials 0.000 claims description 20
- 239000002184 metal Substances 0.000 claims description 20
- 239000011521 glass Substances 0.000 claims description 19
- 230000005679 Peltier effect Effects 0.000 claims description 6
- 238000001816 cooling Methods 0.000 description 19
- 239000004065 semiconductor Substances 0.000 description 7
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 5
- 229910052753 mercury Inorganic materials 0.000 description 5
- 239000000428 dust Substances 0.000 description 3
- 235000012431 wafers Nutrition 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
Landscapes
- Arrangement Of Elements, Cooling, Sealing, Or The Like Of Lighting Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19537483U JPS60105014U (ja) | 1983-12-21 | 1983-12-21 | 光照射装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19537483U JPS60105014U (ja) | 1983-12-21 | 1983-12-21 | 光照射装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60105014U JPS60105014U (ja) | 1985-07-17 |
| JPS631382Y2 true JPS631382Y2 (enrdf_load_stackoverflow) | 1988-01-14 |
Family
ID=30752910
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19537483U Granted JPS60105014U (ja) | 1983-12-21 | 1983-12-21 | 光照射装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60105014U (enrdf_load_stackoverflow) |
-
1983
- 1983-12-21 JP JP19537483U patent/JPS60105014U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60105014U (ja) | 1985-07-17 |
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