JPS63137226U - - Google Patents

Info

Publication number
JPS63137226U
JPS63137226U JP2809287U JP2809287U JPS63137226U JP S63137226 U JPS63137226 U JP S63137226U JP 2809287 U JP2809287 U JP 2809287U JP 2809287 U JP2809287 U JP 2809287U JP S63137226 U JPS63137226 U JP S63137226U
Authority
JP
Japan
Prior art keywords
clean room
grooves
communicates
view
tunnel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2809287U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2809287U priority Critical patent/JPS63137226U/ja
Publication of JPS63137226U publication Critical patent/JPS63137226U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Ventilation (AREA)
JP2809287U 1987-02-28 1987-02-28 Pending JPS63137226U (US20030204162A1-20031030-M00002.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2809287U JPS63137226U (US20030204162A1-20031030-M00002.png) 1987-02-28 1987-02-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2809287U JPS63137226U (US20030204162A1-20031030-M00002.png) 1987-02-28 1987-02-28

Publications (1)

Publication Number Publication Date
JPS63137226U true JPS63137226U (US20030204162A1-20031030-M00002.png) 1988-09-09

Family

ID=30830736

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2809287U Pending JPS63137226U (US20030204162A1-20031030-M00002.png) 1987-02-28 1987-02-28

Country Status (1)

Country Link
JP (1) JPS63137226U (US20030204162A1-20031030-M00002.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0989328A (ja) * 1995-09-26 1997-04-04 Benitsukusu Kk クリーンルームの間仕切構造
JPH0989329A (ja) * 1995-09-26 1997-04-04 Benitsukusu Kk クリーンルームの間仕切構造

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62194141A (ja) * 1986-02-20 1987-08-26 Shimizu Constr Co Ltd クリ−ンル−ム

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62194141A (ja) * 1986-02-20 1987-08-26 Shimizu Constr Co Ltd クリ−ンル−ム

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0989328A (ja) * 1995-09-26 1997-04-04 Benitsukusu Kk クリーンルームの間仕切構造
JPH0989329A (ja) * 1995-09-26 1997-04-04 Benitsukusu Kk クリーンルームの間仕切構造

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