JPS63136677A - Manufacture of piezoelectric ceramics thin plate - Google Patents

Manufacture of piezoelectric ceramics thin plate

Info

Publication number
JPS63136677A
JPS63136677A JP28352886A JP28352886A JPS63136677A JP S63136677 A JPS63136677 A JP S63136677A JP 28352886 A JP28352886 A JP 28352886A JP 28352886 A JP28352886 A JP 28352886A JP S63136677 A JPS63136677 A JP S63136677A
Authority
JP
Japan
Prior art keywords
scattering
ceramic thin
green sheets
thin plate
burning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP28352886A
Inventor
Hiroshi Kawanami
Original Assignee
Fuji Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Electric Co Ltd filed Critical Fuji Electric Co Ltd
Priority to JP28352886A priority Critical patent/JPS63136677A/en
Publication of JPS63136677A publication Critical patent/JPS63136677A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To enable the easy separation without mutual strong bonding and the good surface smoothness without deformation of piezoelectric ceramic thin plates after burning by using zirconium oxide powder for scattering between green sheets.
CONSTITUTION: A green sheet is formed on a film by a tape casting method after deairing a slurry state of a mixture of an oxide such as PbO, ZrO2, TiO2, Nb2O5 or Sb2O3, a solvent, a dispersant and a plasticizer. When a plurality of the obtained green sheets are laminated and burned, the burning is made after uniformly scattering zirconium oxide powder which is used for scattering powder and is classified according to the range of a grain size 37∼88μm between green sheets. This enables the easy separation of laminated and burned ceramic thin plates and the formation of a piezoelectric ceramic thin plate which has good surface smoothness, a uniform composition and no defect.
COPYRIGHT: (C)1988,JPO&Japio
JP28352886A 1986-11-28 1986-11-28 Manufacture of piezoelectric ceramics thin plate Pending JPS63136677A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP28352886A JPS63136677A (en) 1986-11-28 1986-11-28 Manufacture of piezoelectric ceramics thin plate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP28352886A JPS63136677A (en) 1986-11-28 1986-11-28 Manufacture of piezoelectric ceramics thin plate

Publications (1)

Publication Number Publication Date
JPS63136677A true JPS63136677A (en) 1988-06-08

Family

ID=17666702

Family Applications (1)

Application Number Title Priority Date Filing Date
JP28352886A Pending JPS63136677A (en) 1986-11-28 1986-11-28 Manufacture of piezoelectric ceramics thin plate

Country Status (1)

Country Link
JP (1) JPS63136677A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06321645A (en) * 1993-05-10 1994-11-22 Sekisui Plastics Co Ltd Production of barium titanate ceramic semiconductor and fixing liquid for weld preventing agent used therefor
US7882607B2 (en) * 2006-10-11 2011-02-08 Seiko Epson Corporation Method of manufacturing an actuator device
US20120163130A1 (en) * 2010-12-23 2012-06-28 Lockheed Martin Corporation Tape cast multilayer sonar transducer and method

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5586176A (en) * 1978-12-22 1980-06-28 Matsushita Electric Ind Co Ltd Manufacture of piezoelectric material
JPS6131353A (en) * 1984-07-19 1986-02-13 Matsushita Electric Ind Co Ltd Manufacture of piezoelectric ceramic

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5586176A (en) * 1978-12-22 1980-06-28 Matsushita Electric Ind Co Ltd Manufacture of piezoelectric material
JPS6131353A (en) * 1984-07-19 1986-02-13 Matsushita Electric Ind Co Ltd Manufacture of piezoelectric ceramic

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06321645A (en) * 1993-05-10 1994-11-22 Sekisui Plastics Co Ltd Production of barium titanate ceramic semiconductor and fixing liquid for weld preventing agent used therefor
US7882607B2 (en) * 2006-10-11 2011-02-08 Seiko Epson Corporation Method of manufacturing an actuator device
US20120163130A1 (en) * 2010-12-23 2012-06-28 Lockheed Martin Corporation Tape cast multilayer sonar transducer and method
US9070880B2 (en) * 2010-12-23 2015-06-30 Lockheed Martin Corporation Method of manufacturing a tape cast multilayer sonar transducer
US10038958B1 (en) 2010-12-23 2018-07-31 Lockheed Martin Corporation Tape cast multilayer sonar transducer

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