JPS63135239U - - Google Patents

Info

Publication number

JPS63135239U

JPS63135239U JP2733687U JP2733687U JPS63135239U JP S63135239 U JPS63135239 U JP S63135239U JP 2733687 U JP2733687 U JP 2733687U JP 2733687 U JP2733687 U JP 2733687U JP S63135239 U JPS63135239 U JP S63135239U

Authority

JP

Japan

Prior art keywords

gas discharge

inert gas

discharge pipe

inert

probe

Prior art date

1987-02-27

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000011261 inert gas Substances 0.000 claims description 9
• 239000007789 gas Substances 0.000 claims description 5
• 238000001816 cooling Methods 0.000 claims description 3
• 239000000523 sample Substances 0.000 claims description 3
• 238000001514 detection method Methods 0.000 claims description 2
• 238000007796 conventional method Methods 0.000 description 1
• 239000000498 cooling water Substances 0.000 description 1
• 238000010586 diagram Methods 0.000 description 1
• 239000000428 dust Substances 0.000 description 1
• 238000000034 method Methods 0.000 description 1
• 238000005192 partition Methods 0.000 description 1