JPS63134554U - - Google Patents

Info

Publication number

JPS63134554U

JPS63134554U JP2678787U JP2678787U JPS63134554U JP S63134554 U JPS63134554 U JP S63134554U JP 2678787 U JP2678787 U JP 2678787U JP 2678787 U JP2678787 U JP 2678787U JP S63134554 U JPS63134554 U JP S63134554U

Authority

JP

Japan

Prior art keywords

metal vapor

vapor deposited

deposited film

resistor

silicon substrate

Prior art date

1987-02-24

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000002184 metal Substances 0.000 claims description 4
• 229910052710 silicon Inorganic materials 0.000 claims description 3
• 239000010703 silicon Substances 0.000 claims description 3
• 239000000758 substrate Substances 0.000 claims description 3
• XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 2