JPS63131154U - - Google Patents

Info

Publication number
JPS63131154U
JPS63131154U JP2232487U JP2232487U JPS63131154U JP S63131154 U JPS63131154 U JP S63131154U JP 2232487 U JP2232487 U JP 2232487U JP 2232487 U JP2232487 U JP 2232487U JP S63131154 U JPS63131154 U JP S63131154U
Authority
JP
Japan
Prior art keywords
piezoresistors
semiconductor
diffused
lead electrodes
pressure sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2232487U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2232487U priority Critical patent/JPS63131154U/ja
Publication of JPS63131154U publication Critical patent/JPS63131154U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
JP2232487U 1987-02-18 1987-02-18 Pending JPS63131154U (US06721584-20040413-M00025.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2232487U JPS63131154U (US06721584-20040413-M00025.png) 1987-02-18 1987-02-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2232487U JPS63131154U (US06721584-20040413-M00025.png) 1987-02-18 1987-02-18

Publications (1)

Publication Number Publication Date
JPS63131154U true JPS63131154U (US06721584-20040413-M00025.png) 1988-08-26

Family

ID=30819603

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2232487U Pending JPS63131154U (US06721584-20040413-M00025.png) 1987-02-18 1987-02-18

Country Status (1)

Country Link
JP (1) JPS63131154U (US06721584-20040413-M00025.png)

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