JPS63129842U - - Google Patents

Info

Publication number

JPS63129842U

JPS63129842U JP2248687U JP2248687U JPS63129842U JP S63129842 U JPS63129842 U JP S63129842U JP 2248687 U JP2248687 U JP 2248687U JP 2248687 U JP2248687 U JP 2248687U JP S63129842 U JPS63129842 U JP S63129842U

Authority

JP

Japan

Prior art keywords

electrodes

temperature measurement

sides

insulating plate

membrane

Prior art date

1987-02-18

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000009529 body temperature measurement Methods 0.000 claims description 5
• 239000012528 membrane Substances 0.000 claims 2
• 238000007772 electroless plating Methods 0.000 claims 1
• 238000005530 etching Methods 0.000 claims 1
• 238000005259 measurement Methods 0.000 claims 1
• 239000002184 metal Substances 0.000 claims 1
• 239000004593 Epoxy Substances 0.000 description 1
• 239000011521 glass Substances 0.000 description 1
• 239000000758 substrate Substances 0.000 description 1
• 239000010409 thin film Substances 0.000 description 1

Cited By (1)