JPS63129400U - - Google Patents

Info

Publication number

JPS63129400U

JPS63129400U JP2146387U JP2146387U JPS63129400U JP S63129400 U JPS63129400 U JP S63129400U JP 2146387 U JP2146387 U JP 2146387U JP 2146387 U JP2146387 U JP 2146387U JP S63129400 U JPS63129400 U JP S63129400U

Authority

JP

Japan

Prior art keywords

diaphragm

piezoelectric element

supporting

utility

support base

Prior art date

1987-02-16

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000000919 ceramic Substances 0.000 claims description 4
• 239000012528 membrane Substances 0.000 description 3
• 238000010586 diagram Methods 0.000 description 1
• WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1