JPS6312667B2 - - Google Patents

Info

Publication number
JPS6312667B2
JPS6312667B2 JP60091057A JP9105785A JPS6312667B2 JP S6312667 B2 JPS6312667 B2 JP S6312667B2 JP 60091057 A JP60091057 A JP 60091057A JP 9105785 A JP9105785 A JP 9105785A JP S6312667 B2 JPS6312667 B2 JP S6312667B2
Authority
JP
Japan
Prior art keywords
aerosol
processing chamber
treated
coating
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP60091057A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61249567A (ja
Inventor
Takashi Yonehara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TOKYO COPAL CHEM
Original Assignee
TOKYO COPAL CHEM
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TOKYO COPAL CHEM filed Critical TOKYO COPAL CHEM
Priority to JP9105785A priority Critical patent/JPS61249567A/ja
Publication of JPS61249567A publication Critical patent/JPS61249567A/ja
Publication of JPS6312667B2 publication Critical patent/JPS6312667B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
JP9105785A 1985-04-30 1985-04-30 表面改質剤等の塗布液の塗布法 Granted JPS61249567A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9105785A JPS61249567A (ja) 1985-04-30 1985-04-30 表面改質剤等の塗布液の塗布法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9105785A JPS61249567A (ja) 1985-04-30 1985-04-30 表面改質剤等の塗布液の塗布法

Publications (2)

Publication Number Publication Date
JPS61249567A JPS61249567A (ja) 1986-11-06
JPS6312667B2 true JPS6312667B2 (cs) 1988-03-22

Family

ID=14015873

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9105785A Granted JPS61249567A (ja) 1985-04-30 1985-04-30 表面改質剤等の塗布液の塗布法

Country Status (1)

Country Link
JP (1) JPS61249567A (cs)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2898318B2 (ja) * 1989-11-10 1999-05-31 三菱電機株式会社 有機薄膜の形成方法および形成装置
EP1250965A1 (de) * 2001-03-26 2002-10-23 NANOCOATING Gesellschaft für Oberflächentechnologie mbH Verfahren zum Auftragen eines Beschichtungsmittels
FI125920B (en) * 2013-09-09 2016-04-15 Beneq Oy A method of coating a substrate

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5827665A (ja) * 1981-08-10 1983-02-18 Tokyo Copal Kagaku Kk エアロゾルによる表面処理方法及びその装置

Also Published As

Publication number Publication date
JPS61249567A (ja) 1986-11-06

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