JPS63124739U - - Google Patents

Info

Publication number
JPS63124739U
JPS63124739U JP1589187U JP1589187U JPS63124739U JP S63124739 U JPS63124739 U JP S63124739U JP 1589187 U JP1589187 U JP 1589187U JP 1589187 U JP1589187 U JP 1589187U JP S63124739 U JPS63124739 U JP S63124739U
Authority
JP
Japan
Prior art keywords
wafer
heating device
heat treatment
treatment apparatus
semiconductor wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1589187U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1589187U priority Critical patent/JPS63124739U/ja
Publication of JPS63124739U publication Critical patent/JPS63124739U/ja
Pending legal-status Critical Current

Links

JP1589187U 1987-02-05 1987-02-05 Pending JPS63124739U (US07534539-20090519-C00280.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1589187U JPS63124739U (US07534539-20090519-C00280.png) 1987-02-05 1987-02-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1589187U JPS63124739U (US07534539-20090519-C00280.png) 1987-02-05 1987-02-05

Publications (1)

Publication Number Publication Date
JPS63124739U true JPS63124739U (US07534539-20090519-C00280.png) 1988-08-15

Family

ID=30807243

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1589187U Pending JPS63124739U (US07534539-20090519-C00280.png) 1987-02-05 1987-02-05

Country Status (1)

Country Link
JP (1) JPS63124739U (US07534539-20090519-C00280.png)

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