JPS63123051U - - Google Patents
Info
- Publication number
- JPS63123051U JPS63123051U JP1518387U JP1518387U JPS63123051U JP S63123051 U JPS63123051 U JP S63123051U JP 1518387 U JP1518387 U JP 1518387U JP 1518387 U JP1518387 U JP 1518387U JP S63123051 U JPS63123051 U JP S63123051U
- Authority
- JP
- Japan
- Prior art keywords
- mass spectrometer
- pumps
- inductively coupled
- coupled plasma
- oil diffusion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000009792 diffusion process Methods 0.000 claims description 4
- 238000009616 inductively coupled plasma Methods 0.000 claims 3
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Electron Tubes For Measurement (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1518387U JPS63123051U (OSRAM) | 1987-02-04 | 1987-02-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1518387U JPS63123051U (OSRAM) | 1987-02-04 | 1987-02-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63123051U true JPS63123051U (OSRAM) | 1988-08-10 |
Family
ID=30805878
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1518387U Pending JPS63123051U (OSRAM) | 1987-02-04 | 1987-02-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63123051U (OSRAM) |
-
1987
- 1987-02-04 JP JP1518387U patent/JPS63123051U/ja active Pending