JPS63121954U - - Google Patents

Info

Publication number

JPS63121954U

JPS63121954U JP1321387U JP1321387U JPS63121954U JP S63121954 U JPS63121954 U JP S63121954U JP 1321387 U JP1321387 U JP 1321387U JP 1321387 U JP1321387 U JP 1321387U JP S63121954 U JPS63121954 U JP S63121954U

Authority

JP

Japan

Prior art keywords

document

light source

photoelectric conversion

opening

group

Prior art date

1987-01-31

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000006243 chemical reaction Methods 0.000 claims description 7
• 238000001514 detection method Methods 0.000 claims description 4
• 230000008878 coupling Effects 0.000 claims 1
• 238000010168 coupling process Methods 0.000 claims 1
• 238000005859 coupling reaction Methods 0.000 claims 1
• 238000005286 illumination Methods 0.000 claims 1
• 238000003384 imaging method Methods 0.000 claims 1
• 230000003287 optical effect Effects 0.000 claims 1
• 239000000758 substrate Substances 0.000 claims 1