JPS63121436U - - Google Patents

Info

Publication number
JPS63121436U
JPS63121436U JP1150487U JP1150487U JPS63121436U JP S63121436 U JPS63121436 U JP S63121436U JP 1150487 U JP1150487 U JP 1150487U JP 1150487 U JP1150487 U JP 1150487U JP S63121436 U JPS63121436 U JP S63121436U
Authority
JP
Japan
Prior art keywords
section
liquid
filter
storage
nozzle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1150487U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1150487U priority Critical patent/JPS63121436U/ja
Publication of JPS63121436U publication Critical patent/JPS63121436U/ja
Pending legal-status Critical Current

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  • Nozzles (AREA)
  • Weting (AREA)
JP1150487U 1987-01-30 1987-01-30 Pending JPS63121436U (US07223432-20070529-C00017.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1150487U JPS63121436U (US07223432-20070529-C00017.png) 1987-01-30 1987-01-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1150487U JPS63121436U (US07223432-20070529-C00017.png) 1987-01-30 1987-01-30

Publications (1)

Publication Number Publication Date
JPS63121436U true JPS63121436U (US07223432-20070529-C00017.png) 1988-08-05

Family

ID=30798781

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1150487U Pending JPS63121436U (US07223432-20070529-C00017.png) 1987-01-30 1987-01-30

Country Status (1)

Country Link
JP (1) JPS63121436U (US07223432-20070529-C00017.png)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61198723A (ja) * 1985-02-28 1986-09-03 Toshiba Corp レジスト塗布装置
JPS62211920A (ja) * 1986-03-12 1987-09-17 Toshiba Corp レジスト液供給装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61198723A (ja) * 1985-02-28 1986-09-03 Toshiba Corp レジスト塗布装置
JPS62211920A (ja) * 1986-03-12 1987-09-17 Toshiba Corp レジスト液供給装置

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