JPS63121432U - - Google Patents

Info

Publication number
JPS63121432U
JPS63121432U JP1294387U JP1294387U JPS63121432U JP S63121432 U JPS63121432 U JP S63121432U JP 1294387 U JP1294387 U JP 1294387U JP 1294387 U JP1294387 U JP 1294387U JP S63121432 U JPS63121432 U JP S63121432U
Authority
JP
Japan
Prior art keywords
reaction tube
protrusions
support ring
receiving
ring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1294387U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0510353Y2 (US07534539-20090519-C00280.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1294387U priority Critical patent/JPH0510353Y2/ja
Publication of JPS63121432U publication Critical patent/JPS63121432U/ja
Application granted granted Critical
Publication of JPH0510353Y2 publication Critical patent/JPH0510353Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1294387U 1987-01-30 1987-01-30 Expired - Lifetime JPH0510353Y2 (US07534539-20090519-C00280.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1294387U JPH0510353Y2 (US07534539-20090519-C00280.png) 1987-01-30 1987-01-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1294387U JPH0510353Y2 (US07534539-20090519-C00280.png) 1987-01-30 1987-01-30

Publications (2)

Publication Number Publication Date
JPS63121432U true JPS63121432U (US07534539-20090519-C00280.png) 1988-08-05
JPH0510353Y2 JPH0510353Y2 (US07534539-20090519-C00280.png) 1993-03-15

Family

ID=30801544

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1294387U Expired - Lifetime JPH0510353Y2 (US07534539-20090519-C00280.png) 1987-01-30 1987-01-30

Country Status (1)

Country Link
JP (1) JPH0510353Y2 (US07534539-20090519-C00280.png)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0297014A (ja) * 1988-10-03 1990-04-09 Tel Sagami Ltd 熱処理装置及びそのチューブ取付方法並びにそれに用いる治具
JP2008251927A (ja) * 2007-03-30 2008-10-16 Koyo Thermo System Kk 熱処理容器
JP2010027632A (ja) * 2008-07-15 2010-02-04 Shin Etsu Handotai Co Ltd 縦型熱処理装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0297014A (ja) * 1988-10-03 1990-04-09 Tel Sagami Ltd 熱処理装置及びそのチューブ取付方法並びにそれに用いる治具
JP2008251927A (ja) * 2007-03-30 2008-10-16 Koyo Thermo System Kk 熱処理容器
JP2010027632A (ja) * 2008-07-15 2010-02-04 Shin Etsu Handotai Co Ltd 縦型熱処理装置

Also Published As

Publication number Publication date
JPH0510353Y2 (US07534539-20090519-C00280.png) 1993-03-15

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