JPS63120514A - Automatic impedance matching device - Google Patents

Automatic impedance matching device

Info

Publication number
JPS63120514A
JPS63120514A JP26568186A JP26568186A JPS63120514A JP S63120514 A JPS63120514 A JP S63120514A JP 26568186 A JP26568186 A JP 26568186A JP 26568186 A JP26568186 A JP 26568186A JP S63120514 A JPS63120514 A JP S63120514A
Authority
JP
Japan
Prior art keywords
impedance
detection signal
phase difference
difference detection
matching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP26568186A
Other languages
Japanese (ja)
Other versions
JPH0710041B2 (en
Inventor
Hiroshi Yamaguchi
Masahiko Araya
Hiroyuki Kotani
Original Assignee
Daihen Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daihen Corp filed Critical Daihen Corp
Priority to JP26568186A priority Critical patent/JPH0710041B2/en
Publication of JPS63120514A publication Critical patent/JPS63120514A/en
Publication of JPH0710041B2 publication Critical patent/JPH0710041B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Abstract

PURPOSE: To minimize the effect of fluctuation of a high frequency voltage by driving a drive means based on a signal being the result of division of a phase difference detection signal and an impedance difference detection signal by its absolute value signal respectively thereby matching the impedance.
CONSTITUTION: A phase difference between a high frequency voltage and a high frequency current outputted from a high frequency power supply 2 is detected and a phase difference detection signal V1 in response to the phase difference is outputted by a phase difference detector 12, and the impedance difference between the matching impedance and the load circuit impedance is detected and an impedance difference detection signal V2 is outputted by an impedance difference detector 13. The 1st and 2nd drive means are driven based on signals V1/V0 and V2/V0 being the division of the absolute value signal V0 for the phase difference detection signal V1 and the impedance difference detection signal V2 to attain the impedance matching. Thus, the effect due to the fluctuation of the high frequency voltage is not given and the impedance is matched quickly and accurately.
COPYRIGHT: (C)1988,JPO&Japio
JP26568186A 1986-11-10 1986-11-10 Automatic impedance matching device Expired - Lifetime JPH0710041B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP26568186A JPH0710041B2 (en) 1986-11-10 1986-11-10 Automatic impedance matching device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP26568186A JPH0710041B2 (en) 1986-11-10 1986-11-10 Automatic impedance matching device

Publications (2)

Publication Number Publication Date
JPS63120514A true JPS63120514A (en) 1988-05-24
JPH0710041B2 JPH0710041B2 (en) 1995-02-01

Family

ID=17420523

Family Applications (1)

Application Number Title Priority Date Filing Date
JP26568186A Expired - Lifetime JPH0710041B2 (en) 1986-11-10 1986-11-10 Automatic impedance matching device

Country Status (1)

Country Link
JP (1) JPH0710041B2 (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04301913A (en) * 1991-03-28 1992-10-26 Shibaura Eng Works Co Ltd High frequency impedance matching circuit
KR19990029245A (en) * 1997-09-15 1999-04-26 스트라타코스 존 지 Fuzzy Logic Tuning of Radio Frequency Matching Networks
JP2003204237A (en) * 2001-11-05 2003-07-18 Daihen Corp Impedance matching device
JP2012212957A (en) * 2011-03-30 2012-11-01 Yamaha Corp Audio apparatus
JP2015097420A (en) * 2015-01-19 2015-05-21 ヤマハ株式会社 Audio equipment

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04301913A (en) * 1991-03-28 1992-10-26 Shibaura Eng Works Co Ltd High frequency impedance matching circuit
KR19990029245A (en) * 1997-09-15 1999-04-26 스트라타코스 존 지 Fuzzy Logic Tuning of Radio Frequency Matching Networks
JP2003204237A (en) * 2001-11-05 2003-07-18 Daihen Corp Impedance matching device
JP2012212957A (en) * 2011-03-30 2012-11-01 Yamaha Corp Audio apparatus
JP2015097420A (en) * 2015-01-19 2015-05-21 ヤマハ株式会社 Audio equipment

Also Published As

Publication number Publication date
JPH0710041B2 (en) 1995-02-01

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term