JPS63120199U - - Google Patents

Info

Publication number
JPS63120199U
JPS63120199U JP994887U JP994887U JPS63120199U JP S63120199 U JPS63120199 U JP S63120199U JP 994887 U JP994887 U JP 994887U JP 994887 U JP994887 U JP 994887U JP S63120199 U JPS63120199 U JP S63120199U
Authority
JP
Japan
Prior art keywords
liquid supply
flow rate
tank
processing liquid
thin film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP994887U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP994887U priority Critical patent/JPS63120199U/ja
Publication of JPS63120199U publication Critical patent/JPS63120199U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Heat Treatment Of Water, Waste Water Or Sewage (AREA)
JP994887U 1987-01-28 1987-01-28 Pending JPS63120199U (US06724976-20040420-M00002.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP994887U JPS63120199U (US06724976-20040420-M00002.png) 1987-01-28 1987-01-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP994887U JPS63120199U (US06724976-20040420-M00002.png) 1987-01-28 1987-01-28

Publications (1)

Publication Number Publication Date
JPS63120199U true JPS63120199U (US06724976-20040420-M00002.png) 1988-08-03

Family

ID=30795748

Family Applications (1)

Application Number Title Priority Date Filing Date
JP994887U Pending JPS63120199U (US06724976-20040420-M00002.png) 1987-01-28 1987-01-28

Country Status (1)

Country Link
JP (1) JPS63120199U (US06724976-20040420-M00002.png)

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