JPS63119890U - - Google Patents

Info

Publication number

JPS63119890U

JPS63119890U JP1157387U JP1157387U JPS63119890U JP S63119890 U JPS63119890 U JP S63119890U JP 1157387 U JP1157387 U JP 1157387U JP 1157387 U JP1157387 U JP 1157387U JP S63119890 U JPS63119890 U JP S63119890U

Authority

JP

Japan

Prior art keywords

stator vane

flat plate

vacuum pump

end side

annular flat

Prior art date

1987-01-30

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000010586 diagram Methods 0.000 description 3
• 230000015572 biosynthetic process Effects 0.000 description 1
• 238000005755 formation reaction Methods 0.000 description 1

Cited By (1)