JPS6311562U - - Google Patents

Info

Publication number

JPS6311562U

JPS6311562U JP10493486U JP10493486U JPS6311562U JP S6311562 U JPS6311562 U JP S6311562U JP 10493486 U JP10493486 U JP 10493486U JP 10493486 U JP10493486 U JP 10493486U JP S6311562 U JPS6311562 U JP S6311562U

Authority

JP

Japan

Prior art keywords

flow rate

vapor phase

phase growth

output

pressure vapor

Prior art date

1986-07-10

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000001947 vapour-phase growth Methods 0.000 claims description 4
• 230000001105 regulatory effect Effects 0.000 claims 2
• 238000001514 detection method Methods 0.000 description 3
• 238000010586 diagram Methods 0.000 description 1
• 239000004065 semiconductor Substances 0.000 description 1
• 239000000758 substrate Substances 0.000 description 1

Cited By (1)