JPS63112713U - - Google Patents

Info

Publication number

JPS63112713U

JPS63112713U JP397487U JP397487U JPS63112713U JP S63112713 U JPS63112713 U JP S63112713U JP 397487 U JP397487 U JP 397487U JP 397487 U JP397487 U JP 397487U JP S63112713 U JPS63112713 U JP S63112713U

Authority

JP

Japan

Prior art keywords

slide table

detector

movement range

drive unit

output signal

Prior art date

1987-01-14

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000010586 diagram Methods 0.000 description 2
• 230000002093 peripheral effect Effects 0.000 description 1

Cited By (1)