JPS63111615U - - Google Patents

Info

Publication number
JPS63111615U
JPS63111615U JP252487U JP252487U JPS63111615U JP S63111615 U JPS63111615 U JP S63111615U JP 252487 U JP252487 U JP 252487U JP 252487 U JP252487 U JP 252487U JP S63111615 U JPS63111615 U JP S63111615U
Authority
JP
Japan
Prior art keywords
sensitive element
pressure
fluid
flow rate
piezoresistor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP252487U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP252487U priority Critical patent/JPS63111615U/ja
Publication of JPS63111615U publication Critical patent/JPS63111615U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Measuring Volume Flow (AREA)
JP252487U 1987-01-12 1987-01-12 Pending JPS63111615U (US20100223739A1-20100909-C00005.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP252487U JPS63111615U (US20100223739A1-20100909-C00005.png) 1987-01-12 1987-01-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP252487U JPS63111615U (US20100223739A1-20100909-C00005.png) 1987-01-12 1987-01-12

Publications (1)

Publication Number Publication Date
JPS63111615U true JPS63111615U (US20100223739A1-20100909-C00005.png) 1988-07-18

Family

ID=30781443

Family Applications (1)

Application Number Title Priority Date Filing Date
JP252487U Pending JPS63111615U (US20100223739A1-20100909-C00005.png) 1987-01-12 1987-01-12

Country Status (1)

Country Link
JP (1) JPS63111615U (US20100223739A1-20100909-C00005.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101192957B1 (ko) 2010-08-23 2012-10-18 이성호 토르크 튜브 조립체를 적용한 패들식 질량 유량계

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5643019B2 (US20100223739A1-20100909-C00005.png) * 1978-02-10 1981-10-08

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5643019B2 (US20100223739A1-20100909-C00005.png) * 1978-02-10 1981-10-08

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101192957B1 (ko) 2010-08-23 2012-10-18 이성호 토르크 튜브 조립체를 적용한 패들식 질량 유량계

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