JPS63110867U - - Google Patents

Info

Publication number

JPS63110867U

JPS63110867U JP123187U JP123187U JPS63110867U JP S63110867 U JPS63110867 U JP S63110867U JP 123187 U JP123187 U JP 123187U JP 123187 U JP123187 U JP 123187U JP S63110867 U JPS63110867 U JP S63110867U

Authority

JP

Japan

Prior art keywords

chamber

cooling device

partition wall

pressure gas

gas cylinder

Prior art date

1987-01-08

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000001816 cooling Methods 0.000 claims description 4
• 238000001514 detection method Methods 0.000 claims description 4
• 238000005192 partition Methods 0.000 claims description 3
• 239000012528 membrane Substances 0.000 claims description 2
• 238000010586 diagram Methods 0.000 description 3