JPS63110562U - - Google Patents

Info

Publication number

JPS63110562U

JPS63110562U JP141987U JP141987U JPS63110562U JP S63110562 U JPS63110562 U JP S63110562U JP 141987 U JP141987 U JP 141987U JP 141987 U JP141987 U JP 141987U JP S63110562 U JPS63110562 U JP S63110562U

Authority

JP

Japan

Prior art keywords

rotating shaft

evaporation source

shutter device

substrate

attached

Prior art date

1987-01-08

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000001704 evaporation Methods 0.000 claims description 5
• 230000008020 evaporation Effects 0.000 claims description 5
• 239000000758 substrate Substances 0.000 claims description 3
• 239000000463 material Substances 0.000 claims 1
• 230000002093 peripheral effect Effects 0.000 claims 1
• 238000007738 vacuum evaporation Methods 0.000 claims 1