JPS63108630U - - Google Patents

Info

Publication number
JPS63108630U
JPS63108630U JP19968786U JP19968786U JPS63108630U JP S63108630 U JPS63108630 U JP S63108630U JP 19968786 U JP19968786 U JP 19968786U JP 19968786 U JP19968786 U JP 19968786U JP S63108630 U JPS63108630 U JP S63108630U
Authority
JP
Japan
Prior art keywords
hook
gas
nozzle
cassette
draining device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP19968786U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0244522Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19968786U priority Critical patent/JPH0244522Y2/ja
Publication of JPS63108630U publication Critical patent/JPS63108630U/ja
Application granted granted Critical
Publication of JPH0244522Y2 publication Critical patent/JPH0244522Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
  • Weting (AREA)
JP19968786U 1986-12-29 1986-12-29 Expired JPH0244522Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19968786U JPH0244522Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-12-29 1986-12-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19968786U JPH0244522Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-12-29 1986-12-29

Publications (2)

Publication Number Publication Date
JPS63108630U true JPS63108630U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-07-13
JPH0244522Y2 JPH0244522Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1990-11-27

Family

ID=31161543

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19968786U Expired JPH0244522Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-12-29 1986-12-29

Country Status (1)

Country Link
JP (1) JPH0244522Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06208098A (ja) * 1993-09-20 1994-07-26 Shibaura Eng Works Co Ltd 基板洗浄装置
WO2007077992A1 (ja) * 2006-01-06 2007-07-12 Tokyo Electron Limited 被処理体搬送器の洗浄・乾燥処理方法、及び洗浄・乾燥処理装置、並びに記憶媒体

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4907468B2 (ja) * 2007-08-16 2012-03-28 東京エレクトロン株式会社 洗浄装置及び洗浄方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06208098A (ja) * 1993-09-20 1994-07-26 Shibaura Eng Works Co Ltd 基板洗浄装置
WO2007077992A1 (ja) * 2006-01-06 2007-07-12 Tokyo Electron Limited 被処理体搬送器の洗浄・乾燥処理方法、及び洗浄・乾燥処理装置、並びに記憶媒体

Also Published As

Publication number Publication date
JPH0244522Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1990-11-27

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