JPS63107787U - - Google Patents

Info

Publication number

JPS63107787U

JPS63107787U JP20226286U JP20226286U JPS63107787U JP S63107787 U JPS63107787 U JP S63107787U JP 20226286 U JP20226286 U JP 20226286U JP 20226286 U JP20226286 U JP 20226286U JP S63107787 U JPS63107787 U JP S63107787U

Authority

JP

Japan

Prior art keywords

chemical liquid

liquid pump

chemical

cleaning device

pump

Prior art date

1986-12-26

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000000126 substance Substances 0.000 claims description 11
• 238000004140 cleaning Methods 0.000 claims description 4
• 239000007788 liquid Substances 0.000 claims 10
• 239000007921 spray Substances 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 2
• 239000003814 drug Substances 0.000 description 1
• 229940079593 drug Drugs 0.000 description 1
• 238000002347 injection Methods 0.000 description 1
• 239000007924 injection Substances 0.000 description 1