JPS63107739U - - Google Patents

Info

Publication number

JPS63107739U

JPS63107739U JP19907986U JP19907986U JPS63107739U JP S63107739 U JPS63107739 U JP S63107739U JP 19907986 U JP19907986 U JP 19907986U JP 19907986 U JP19907986 U JP 19907986U JP S63107739 U JPS63107739 U JP S63107739U

Authority

JP

Japan

Prior art keywords

air flow

flow path

sensor

output signal

dust collection

Prior art date

1986-12-26

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 4
• 239000001301 oxygen Substances 0.000 claims description 4
• 229910052760 oxygen Inorganic materials 0.000 claims description 4
• 239000000428 dust Substances 0.000 claims description 2
• 239000002341 toxic gas Substances 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 2