JPS63106756U - - Google Patents

Info

Publication number
JPS63106756U
JPS63106756U JP20317386U JP20317386U JPS63106756U JP S63106756 U JPS63106756 U JP S63106756U JP 20317386 U JP20317386 U JP 20317386U JP 20317386 U JP20317386 U JP 20317386U JP S63106756 U JPS63106756 U JP S63106756U
Authority
JP
Japan
Prior art keywords
furnace
heat treatment
gas
atmosphere gas
oxide film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP20317386U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0217000Y2 (US06373033-20020416-M00071.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP20317386U priority Critical patent/JPH0217000Y2/ja
Publication of JPS63106756U publication Critical patent/JPS63106756U/ja
Application granted granted Critical
Publication of JPH0217000Y2 publication Critical patent/JPH0217000Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Furnace Details (AREA)
JP20317386U 1986-12-26 1986-12-26 Expired JPH0217000Y2 (US06373033-20020416-M00071.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20317386U JPH0217000Y2 (US06373033-20020416-M00071.png) 1986-12-26 1986-12-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20317386U JPH0217000Y2 (US06373033-20020416-M00071.png) 1986-12-26 1986-12-26

Publications (2)

Publication Number Publication Date
JPS63106756U true JPS63106756U (US06373033-20020416-M00071.png) 1988-07-09
JPH0217000Y2 JPH0217000Y2 (US06373033-20020416-M00071.png) 1990-05-11

Family

ID=31168253

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20317386U Expired JPH0217000Y2 (US06373033-20020416-M00071.png) 1986-12-26 1986-12-26

Country Status (1)

Country Link
JP (1) JPH0217000Y2 (US06373033-20020416-M00071.png)

Also Published As

Publication number Publication date
JPH0217000Y2 (US06373033-20020416-M00071.png) 1990-05-11

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