JPS63104925U - - Google Patents

Info

Publication number
JPS63104925U
JPS63104925U JP20194586U JP20194586U JPS63104925U JP S63104925 U JPS63104925 U JP S63104925U JP 20194586 U JP20194586 U JP 20194586U JP 20194586 U JP20194586 U JP 20194586U JP S63104925 U JPS63104925 U JP S63104925U
Authority
JP
Japan
Prior art keywords
air
room
jet
air shower
clean room
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP20194586U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP20194586U priority Critical patent/JPS63104925U/ja
Publication of JPS63104925U publication Critical patent/JPS63104925U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Cleaning In General (AREA)
  • Ventilation (AREA)
JP20194586U 1986-12-25 1986-12-25 Pending JPS63104925U (US07413550-20080819-C00001.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20194586U JPS63104925U (US07413550-20080819-C00001.png) 1986-12-25 1986-12-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20194586U JPS63104925U (US07413550-20080819-C00001.png) 1986-12-25 1986-12-25

Publications (1)

Publication Number Publication Date
JPS63104925U true JPS63104925U (US07413550-20080819-C00001.png) 1988-07-07

Family

ID=31165875

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20194586U Pending JPS63104925U (US07413550-20080819-C00001.png) 1986-12-25 1986-12-25

Country Status (1)

Country Link
JP (1) JPS63104925U (US07413550-20080819-C00001.png)

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