JPS63102769U - - Google Patents

Info

Publication number

JPS63102769U

JPS63102769U JP19608086U JP19608086U JPS63102769U JP S63102769 U JPS63102769 U JP S63102769U JP 19608086 U JP19608086 U JP 19608086U JP 19608086 U JP19608086 U JP 19608086U JP S63102769 U JPS63102769 U JP S63102769U

Authority

JP

Japan

Prior art keywords

semiconductor film

compound semiconductor

susceptor

substrate

forming

Prior art date

1986-12-19

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000000758 substrate Substances 0.000 claims description 4
• 150000001875 compounds Chemical class 0.000 claims 6
• 239000004065 semiconductor Substances 0.000 claims 6
• 239000002184 metal Substances 0.000 claims 1
• 238000000034 method Methods 0.000 claims 1
• 230000000737 periodic effect Effects 0.000 claims 1
• 239000002994 raw material Substances 0.000 claims 1
• 238000001947 vapour-phase growth Methods 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 2
• 238000010438 heat treatment Methods 0.000 description 1

Cited By (1)